Characterization of ALD grown Ti x Al y N and Ti x Al y C thin films

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چکیده

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ژورنال

عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

سال: 2017

ISSN: 0168-583X

DOI: 10.1016/j.nimb.2016.12.032